Application of precision diamond machining to the manufacture of micro-photonics components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5183, Issue , 2003, Pages 94-108

  Davies, M A ^a   Evans, C J ^c   Patterson, S R ^a   Vohra, R ^a   Bergner, B C ^b  

^a University of North Carolina at Charlotte   (United States)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^c ZYGO CORPORATION   (United States)

Author keywords

Diamond micro milling; Diamond turning; Micro optics replication

Indexed keywords

COST EFFECTIVENESS; DIAMOND CUTTING TOOLS; FEEDBACK; LIGHT REFLECTION; MICROMACHINING; MICROMETERS; OPTICAL MATERIALS; PHOTOLITHOGRAPHY; SINGLE CRYSTALS; SURFACE PHENOMENA; SYNCHROTRON RADIATION;

DIAMOND MICRO-MILLING; DIAMOND TURNING; MICRO-OPTICS REPLICATION; PRECISION PATTERN;

MICROOPTICS;

EID: 2342568461     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506373     Document Type: Conference Paper

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