Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique

Precision Engineering

Volumn 29, Issue 2, 2005, Pages 219-228

  Bariani, P ^a   De Chiffre, L ^a   Hansen, H N ^a   Horsewell, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Calibration; Metrology; SEM; Stereo pair technique; Stereoscopic SEM; Surface reconstruction; Traceability; Uncertainty

Indexed keywords

ANGLE MEASUREMENT; CALIBRATION; INTERFEROMETRY; LASER BEAM EFFECTS; PHOTOGRAMMETRY; SCANNING ELECTRON MICROSCOPY; SPECIAL EFFECTS; UNCERTAIN SYSTEMS;

STEREO-PAIR TECHNIQUE; STEREOSCOPIC SEM; SURFACE RECONSTRUCTION; TRACEABILITY; UNCERTAINTY;

MEASUREMENT THEORY;

EID: 14944374763     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2004.08.002     Document Type: Article

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