Calibration of displacement sensors up to 300 μm with nanometre accuracy and direct traceability to a primary standard of length

Metrologia

Volumn 37, Issue 1, 2000, Pages 25-33

  Haitjema, H ^a   Schellekens, P H J ^a   Wetzels, S F C L ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLACEMENT SENSORS; NANOMETER SENSORS;

FABRY-PEROT INTERFEROMETERS; HOLOGRAPHIC INTERFEROMETRY; INTERFEROMETERS; LASER APPLICATIONS; MIRRORS; NANOTECHNOLOGY; OPTICAL SENSORS; POSITION MEASUREMENT; STANDARDIZATION;

DISTANCE MEASUREMENT;

EID: 0033720714     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/37/1/4     Document Type: Article

References (13)

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