Nano-position sensing using optically motion-controlled microprobe with PSD based on laser trapping technique

CIRP Annals - Manufacturing Technology

Volumn 54, Issue 1, 2005, Pages 467-470

  Takaya, Y ^a   Imai, K ^a   Dejima, S ^a   Miyoshi, T ^a   Ikawa, N ^b  

^a OSAKA UNIVERSITY   (Japan)

^b NONE

Author keywords

Nano CMM; Optical measurement; Ultra precision

Indexed keywords

BROWNIAN MOVEMENT; COORDINATE MEASURING MACHINES; GRAVITATION; HARMONIC ANALYSIS; LASER APPLICATIONS; LASER BEAMS; MOTION CONTROL; NANOTECHNOLOGY; OPTICAL SYSTEMS; PRESSURE CONTROL; PROBES; TRACKING (POSITION);

HARMONIC POTENTIALS; NANO-CMM; OPTICAL MEASUREMENTS; ULTRA-PRECISION;

OPTICAL SENSORS;

EID: 21944437694     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60146-2     Document Type: Article

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