The critical role of metrology in nanotechnology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4608, Issue , 2002, Pages 116-124

  Schattenburg, Mark L ^a   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Lithography; Metrology; Nanometrology; Nanostructures; Nanotechnology

Indexed keywords

ELECTRIC PROPERTIES; MAGNETIC PROPERTIES; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES;

CRITICAL DIMENSION; NANODEVICES; NANOMETROLOGY;

NANOTECHNOLOGY;

EID: 0036030104     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.437273     Document Type: Conference Paper

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