Design of micro-photonic beam steering systems

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 1, 2002, Pages 335-338

  Kim, S G ^a   Shi, Y ^a   Jeon, Y ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

MEMS; Optical; Piezoelectric

Indexed keywords

ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL ENGINEERING; OPTICAL SWITCHES; PIEZOELECTRICITY; THIN FILMS;

MICROENDOSCOPY; MICROFABRICATION PROCESSES;

SYSTEMS ANALYSIS;

EID: 0037838765     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61530-3     Document Type: Article

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