Optical methods for dimensional metrology in production engineering

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 2, 2002, Pages 685-699

  Schwenke, H ^a   Neuschaefer Rube, U ^a   Pfeifer, T ^b   Kunzmann, H ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Dimensional metrology; Optical methods; Production engineering

Indexed keywords

LIGHT INTERFERENCE; LIGHT MEASUREMENT; OPTICAL PROPERTIES; OPTOELECTRONIC DEVICES; SURFACE MEASUREMENT;

DIMENSIONAL METROLOGY; MASS PRODUCTS; SPATIAL COORDINATES;

PRODUCTION ENGINEERING;

EID: 0036972590     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61707-7     Document Type: Article

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