Decoupled microgyros and the design principle DAVED

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 170-173

  Geiger, W ^a   Butt, W U ^a   Gaisser A ^a   Frech, J ^a   Braxmaier, M ^a   Link, T ^a   Kohne, A ^a   Nommensen, P ^a   Sandmaier, H ^b   Lang, W ^a  

^a Hahn Schickard Gesellschaft   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; OPTIMIZATION; SENSITIVITY ANALYSIS; SURFACE PROPERTIES; THERMAL EFFECTS;

DECOUPLED ANGULAR VELOCITY DETECTORS (DAVED);

GYROSCOPES;

EID: 0035013824     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00732-4     Document Type: Article

References (6)