Design and calibration of a parallel-moving displacement generator for nano-metrology

Measurement Science and Technology

Volumn 9, Issue 7, 1998, Pages 1098-1104

  Haitjema, Han ^a   Rosielle, Nick ^a   Kotte, Gerard ^b   Steijaert, Hans ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NMi Van Swinden Laboratorium   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELASTICITY; FABRY-PEROT INTERFEROMETERS; LASER APPLICATIONS; MIRRORS; PIEZOELECTRIC DEVICES; PROBES;

LASER INTERFEROMETRY; PARALLEL MOVING DISPLACEMENT GENERATORS;

SPATIAL VARIABLES MEASUREMENT;

EID: 0032116949     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/7/016     Document Type: Article

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