Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer

Measurement: Journal of the International Measurement Confederation

Volumn 25, Issue 1, 1999, Pages 9-18

  Takaya, Yasuhiro ^a   Shimizu, Hiroki ^a   Takahashi, Satoru ^a   Miyoshi, Takashi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Laser trapping probe; Micro parts; Mirau microscope interferometer; Nano CMM

Indexed keywords

EID: 3142677912     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-2241(98)00062-1     Document Type: Article

References (9)

1. K. Takamasu, S. Ozono, T. Asano, et al., Basic concept of nano-CMM (coordinate measuring machine with nanometre resolution), Proceedings of The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering, Hayama, Kanagawa, Japan, 4 October, 1996, p. 155.
2. A. Ashkin, J.M. Dziedzic, Optical levitation by radiation pressure, Appl. Phys. Lett. 19(8) (1971) 283.
3. A. Ashkin, J.M. Dziedzic, Stability of optical levitation by radiation pressure, Appl. Phys. Lett. 24(12) (1974) 586.
4. A. Ashkin, J.M. Dziedzic, Observation of resonances in the radiation pressure on dielectric spheres, Phys. Rev. Lett. 38(23) (1977) 1351.
5. A. Ashkin, J.M. Dziedzic, Observation of a singlebeam gradient force optical trap for dielectric particles, Opt. Lett. 11 (1986) 288.
6. P. de Groot, L. Deck, Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms, Opt. Lett. 18(17) (1993) 1462.
7. P. de Groot, L. Deck, Surface profiling by analysis of white-light interferograms in the spatial frequency domain, J. Mod. Opt. 42(2) (1995) 389.
8. S.S.C. Chim, G.S. Kino, Three-dimensional image realization in interference microscopy, Appl. Opt. 31(14) (1992) 2550.
9. J.F. Biegen, Calibration requirements for Mirau and Linnik microscope interferometers, Appl. Opt. 18(11) (1989) 1972.