Tantalum oxide thin films as protective coatings for sensors

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 267-272

  Christensen, Carsten ^a   de Reus, Roger ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC PROPERTIES OF SOLIDS; ETCHING; HYDROFLUORIC ACID; OXIDES; PASSIVATION; PROTECTIVE COATINGS; SPUTTER DEPOSITION; TANTALUM COMPOUNDS;

DIELECTRIC STRENGTH; HAND PATTERNING; TANTALUM OXIDE;

MICROSENSORS;

EID: 0032687815     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746832     Document Type: Conference Paper

References (12)