An Approach to the Development of Tolerance Systems for Micro-and Nanotechnology

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 230-241

  Schobel J ^a   Westkamper E ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Calibration; Development of tolerance systems for micro and nanotechnology; Instrumentation; Machining experiments; Methods; Nanoscale calibration standards; Tolerancing and standards

Indexed keywords

EID: 73149091342     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch17     Document Type: Chapter

References (9)

1. H. N. Hansen et al., Calibration and industrial application of instruments for surface mapping based on AFM, Ann. CIRP 51 (1), 471-474 (2002).
2. E. Westkämper and M. H.R. Kraus, Functional and depth oriented characterisation of technical surfaces, in Proceedings of the 1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnolgy, Copenhagen, May 28-30, 2000 (Center for Geometrical Metrology, Lyngby, DK, 2000).
3. ISO/TR 14638, Geometrical Product Specifications (GPS)-Masterplan, 1995.
4. SPIP-The Scanning Probe Image Processor, Image Metrology ApS, Lyngby, Denmark, http://www.imagemet.com.
5. ISO 5436-1, Geometrical Product Specifications (GPS)-Surface texture: Profile method; Measurement standards-Part 1: Material measures, 2000.
6. R. Krüger-Sehm et al., Judgement of the profile of nano-roughness standard specimens by different contacting and non contacting methods, in Proceedings of the NanoScale 2004, Braunschweig, Germany, March 25-26, 2004.
7. K. Carneiro et al., Roughness parameters of surfaces by atomic force microscopy, Ann. CIRP 44 (1), 517-522 (1995).
8. ISO 13565-2, Geometrical Product Specifications (GPS)-Surface texture: Profile method; Surfaces having stratified functional properties-Part 2: Height Characterization using the linear material ratio curve, 1996.
9. E. Westkämper and H.-W. Hoffmeister, Function-oriented lapping and polishing of ceramic rolling elements through characterization of the workpiece surface, Ann. CIRP 45 (1), 529-532 (1996).