Sputtering yields

Topics in Applied Physics

Volumn 110, Issue , 2007, Pages 33-187

  Eckstein, Wolfgang ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

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EID: 41749094789     PISSN: 03034216     EISSN: 14370859     Source Type: Book Series    
DOI: 10.1007/978-3-540-44502-9_3     Document Type: Article

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