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Volumn 19, Issue 4, 1979, Pages 421-426
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Sputtering yields for light ions as a function of angle of incidence
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Author keywords
20 m; 79
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Indexed keywords
GOLD AND ALLOYS - SPUTTERING;
IONS;
MOLYBDENUM AND ALLOYS - SPUTTERING;
NICKEL AND ALLOYS - SPUTTERING;
SPUTTERING;
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EID: 0018505626
PISSN: 03403793
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/BF00930106 Document Type: Article |
Times cited : (58)
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References (21)
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