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Volumn 19, Issue 4, 1979, Pages 421-426

Sputtering yields for light ions as a function of angle of incidence

Author keywords

20 m; 79

Indexed keywords

GOLD AND ALLOYS - SPUTTERING; IONS; MOLYBDENUM AND ALLOYS - SPUTTERING; NICKEL AND ALLOYS - SPUTTERING;

EID: 0018505626     PISSN: 03403793     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/BF00930106     Document Type: Article
Times cited : (58)

References (21)
  • 2
    • 84933722390 scopus 로고    scopus 로고
    • J.Bohdansky, H.L.Bay, J.Roth: 7th Int. Vac. Congr. and 3rd Int. Conf. Solid Surfaces, Vienna, ed. and publ. by R.Dobrozemsky, F.Rüdenauer, F.P.Viehböck, A.Breth (1977) p. 1509
  • 3
    • 84933722383 scopus 로고    scopus 로고
    • B.M.U.Scherzer, R.Behrisch, J.Roth: Int. Symp. on Plasma Wall Interaction, Jülich (1976) p. 353
  • 4
    • 84933722380 scopus 로고    scopus 로고
    • M.Kaminsky: Proc. Atomic Coll. in Solids, Moscow (1977)
  • 5
    • 84933722387 scopus 로고    scopus 로고
    • Atomic and Nuclear Data for Fusion, Proc. Advisory Group Meeting on Atomic and Molecular data for Fusion, Culham (1976) IAEA-199
  • 6
    • 84933722385 scopus 로고    scopus 로고
    • H.W.Müller, J.Jordan, S.Kalbitzer, J.Kiko, T.Kirsten: Proc. 7th Lunar Science Conf. (1976)
  • 17
    • 84933722376 scopus 로고    scopus 로고
    • G.Maderlechner, R.Behrisch, B.M.U.Scherzer, M.T.Robinson: Proc. Atomic Coll. in Solids, Moscow (1977)
  • 19
    • 84933722375 scopus 로고    scopus 로고
    • H.H. Andersen, H.L. Bay: In Sputtering by Ion Bombardment, Physics and Applications, ed. by R. Behrisch, Topics in Appl. Phys. (Springer: Berlin, Heidelberg, New York)
  • 21
    • 84933722371 scopus 로고    scopus 로고
    • T.J.Hoffmann, H.L.Dodds, M.T.Robinson, D.K.Holmes: Trans. Am. Nucl. Soc., 1977, Wintermeeting, San Francisco (1977)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.