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Volumn , Issue Suppl, 1991, Pages 51-61
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Physical sputtering
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
IONS;
NUCLEAR ENERGY - FUSION REACTIONS;
PLASMAS;
MAXWELLIAN BOMBARDMENT;
SPUTTERING YIELD;
SPUTTERING;
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EID: 0026397034
PISSN: 00295515
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (53)
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References (43)
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