EFFECT OF OXYGEN IMPLANTATION UPON SECONDARY ION YIELDS.

Journal of vacuum science & technology

Volumn 18, Issue 2, 1980, Pages 164-168

  Morgan, A E ^a   de Grefte, H A M ^a   Tolle, H J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING;

EID: 0018986247     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.570716     Document Type: Conference Paper

References (18)