Temporal aspects of sputtering of TaC, C, and Ta targets

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 2, 1997, Pages 215-223

  Vichev, R G ^a,c   Eckstein, W ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c INSTITUTE OF ELECTRONICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CARBIDES; COMPUTER APPLICATIONS; MONTE CARLO METHODS; TANTALUM COMPOUNDS; TARGETS;

COLLISION CASCADES; SPUTTERED ATOMS; TAC, C AND TA TARGETS;

SPUTTERING;

EID: 0031079021     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00822-1     Document Type: Article

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