Simulation of sputtering following ion bombardment at a target step

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 194, Issue 4, 2002, Pages 425-433

  Shapiro, M H ^a,b   Tombrello, T A ^b  

^a CALIFORNIA STATE UNIVERSITY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Sputtered atoms; Sputtering; Target step

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; MOLECULAR DYNAMICS; SPUTTERING; SURFACE TOPOGRAPHY;

BINARY COLLISIONS;

TARGETS;

EID: 0036037184     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00949-7     Document Type: Article

References (6)