New fit formulae for the sputtering yield

Journal of Nuclear Materials

Volumn 320, Issue 3, 2003, Pages 209-213

  Eckstein, W ^a   Preuss, R ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; IMPURITIES; MATHEMATICAL MODELS; PLASMAS; PROBLEM SOLVING; SPUTTERING; SUBLIMATION;

THRESHOLD ENERGY;

NUCLEAR PHYSICS;

EID: 0037696882     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(03)00192-2     Document Type: Article

References (16)

1. Eckstein W., Garcia-Rosales C., Roth J., Làszlò J. Nucl. Instrum. and Meth. B. 83:1993;95.
2. Verbeek H., Stober J., Coster D.P., Eckstein W., Schneider R. Nucl. Fusion. 38:1998;1789.
3. Biersack J.P., Eckstein W. Appl. Phys. A. 34:1984;73.
4. Eckstein W. Springer Series in Materials Science. vol. 10:1991;Springer, Berlin, Heidelberg, New York.
5. Wilson W.D., Haggmark L.G., Biersack J.P. Phys. Rev. B. 15:1977;2458.
6. Oen O.S., Robinson M.T. Nucl. Instrum. and Meth. 132:1976;647.
7. Lindhard J., Scharff M. Phys. Rev. 124:1961;128.
8. Garcia-Rosales C., Eckstein W., Roth J. J. Nucl. Mater. 218:1994;8.
9. Bohdansky J. Nucl. Instrum. and Meth. B. 2:1984;587.
10. Takeuchi W., Yamamura Y. Radiat. Eff. 71:1983;53.
11. W. Eckstein, C. García-Rosales, J. Roth, W. Ottenberger, Report IPP 9/82, Garching, 1993.
12. Dose V., Preuss R., Roth J. J. Nucl. Mater. 288:2001;153. (see Eq. (35)).
13. Y. Yamamura, Y. Itikawa, N. Itoh, IPPJ-AM-26, Nagoya, 1993.
14. Sivia D.S. Data Analysis: A Bayesian Tutorial. 1996;Clarendon, Oxford.
15. Eckstein W., Stephens J.A., Clark R.E.H., Davis J.W., Haasz A.A., Vietzke E., Hirooka Y. Atomic and Plasma-Material Interaction Data for Fusion. vol. 7, Part B:2001;IAEA, Vienna.
16. W. Eckstein, Report IPP 9/132, Garching, 2002.