Sputtering of niobium by niobium, hydrogen, deuterium, and helium ions in the 10- to 80-keV energy range

Journal of Applied Physics

Volumn 42, Issue 12, 1971, Pages 4774-4778

  Summers, A J ^a   Freeman, N J ^a   Daly, N R ^a  

^a AWE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COLUMBIUM AND ALLOYS--SPUTTERING;

EID: 0015158946     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1659854     Document Type: Article

References (12)