Influence of the impact angle on the depth resolution and the sensitivity in SIMS depth profiling using a cesium ion beam

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 3, Issue 3, 1985, Pages 1350-1354

  Wittmaack, K ^a  

^a Physikalisch—Technische Abteilung ^*  (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3042876161     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.572775     Document Type: Article

References (22)

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