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Journal of Applied Physics

Volumn 46, Issue 5, 1975, Pages 1919-1921

Heavy-ion sputtering yield of silicon

(2) Andersen, H H a Bay, H L a

a AARHUS UNIVERSITY (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING;

SEMICONDUCTING SILICON;

EID: 0016508261 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.321889 Document Type: Article

Times cited : (62)

References (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.