SCOPUS 정보 검색 플랫폼

Volumn 37, Issue 2, 1985, Pages 95-108

Computer simulation of two-component target sputtering

Author keywords

79.20

Indexed keywords

BORON - SPUTTERING; TANTALUM CARBIDE - SPUTTERING; TITANIUM CARBIDE - SPUTTERING; TITANIUM COMPOUNDS - SPUTTERING; TUNGSTEN CARBIDE - SPUTTERING;

MONTE CARLO SIMULATION; TITANIUM DEUTERIDE; TRIM SPUTTERING PROGRAM; TWO-COMPONENT TARGET SPUTTERING;

SPUTTERING;

EID: 0022075281 PISSN: 07217250 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/BF00618859 Document Type: Article

Times cited : (106)

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