Sputtering studies with the Monte Carlo Program TRIM.SP

Applied Physics A Solids and Surfaces

Volumn 34, Issue 2, 1984, Pages 73-94

  Biersack, J P ^a,b   Eckstein, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

20; 79

Indexed keywords

SPUTTERING;

EID: 0021441994     PISSN: 07217250     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/BF00614759     Document Type: Article

References (67)

1. A Monte Carlo computer program for the transport of energetic ions in amorphous targets
2. Monte Carlo studies of sputtering
3. Monte Carlo calculations of light-ion sputtering as a function of the incident angle
4. Light ion sputtering for H, D and He in the energy range of 25 keV to 100 keV
5. Collection and sputtering experiments with noble gas ions
6. Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev
7. II. The energy spectrum of ejected atoms during the high energy sputtering of gold