Consequences of sputtering with molecular ions

Journal of Applied Physics

Volumn 56, Issue 1, 1984, Pages 220-223

  Zalm, P C ^a   Beckers, L J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; IONS - APPLICATIONS;

SPUTTERING;

EID: 0021468872     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.333755     Document Type: Article

References (0)