LOW ENERGY SELFSPUTTERING YIELDS OF MOLYBDENUM AND TUNGSTEN.

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

Volumn 22, Issue 9, 1983, Pages 1361-1365

  Saidoh, Masahiro ^a   Sone, Kazuho ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

TUNGSTEN AND ALLOYS - SPUTTERING;

MOLYBDENUM AND ALLOYS;

EID: 0020814156     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.22.1361     Document Type: Article

References (21)