Computer calculations of single crystal sputtering by low energy ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 115, Issue 1-4, 1996, Pages 544-548

  Promokhov, A A ^a   Eltekov, V A ^a   Yurasova, V E ^a   Colligon, J S ^b   Mosunov, A S ^c  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b UNIVERSITY OF SALFORD   (United Kingdom)

^c RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; COPPER; CRYSTAL ATOMIC STRUCTURE; ELECTRON ENERGY LEVELS; IONS; MOLECULAR DYNAMICS; SPUTTERING;

COPPER CRYSTAL SPUTTERING; ENERGY DISTRIBUTIONS;

SINGLE CRYSTALS;

EID: 0030564416     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00181-4     Document Type: Article

References (25)

1. G. Betz and K. Wien, Int. J. Mass Spectrom. Ion Proc. 140 (1994) 1.
2. J.I. Onate and J.S. Colligon, Vacuum 45 (1994) 995.
3. J.E. Sundgren, Thin Solid Films 128 (1985) 21.
4. H. Kheyrandish, J.S. Colligon and J.K. Kim, J. Vac. Sci. Technol. 12 (1994) 2723.
5. P.J. Kelly, R.D. Arnell and W. Ahmed, Surf. Eng. 9 (1993) 287.
6. J.S. Colligon, H. Kheyrandish, L. Lesnevsky, A. Naumkin, A. Rogozin, I.I. Shkarban, L.A. Vasilyev and V.E. Yurasova, Surf. Coatings Technol. 70 (1994) 9.
7. L.A. Vasilyev, O.P. Ivanova, J.S. Colligon, L.N. Lesnevsky, A.V. Naumkin, I.I. Shkarban and V.E. Yurasova, Izv. RAN, Ser. Fiz. 58 (1994) 230.
8. J.M.E. Harper, J.J. Cuomo, R.J. Gambino and H.R. Kaufman, Nucl. Instr. and Meth. B 7-8 (1985) 886.
9. J.M.E. Harper, S. Berg, C. Nender and I.V. Katardjiev, J. Vac. Sci. Technol. A 10 (1992) 1765.
10. M.T. Robinson and I.M. Torrens, Phys. Rev. B 9 (1974) 5008.
11. D.E. Harrison, Jr., J. Crit. Rev. Solid State Mater. Sci. 14 (1988) Suppl. 1.
12. H.H. Andersen, Nucl. Instr. and Meth. B 18 (1987) 321.
13. W. Eckstein, Computer Simulation of Ion-Solid Interactions, Springer Series in Mater. Sci. 10 Springer Verlag, (Berlin, Heidelberg, 1991).
14. J. Lindhard, M. Scharff and H.E. Schiøtt, K. Dan. Vidensk. Selsk. Mat.-Fys. Medd. 33 (1963) 1.
15. O.B. Firsov, Zh. Eksp. Teor. Fiz. 36 (1957) 696.
16. V.I. Shulga, Radiat. Eff. 51 (1980) 1.
17. V.A. Eltekov, V.N. Samoilov, V.E. Yurasova and H. Motaweh, Nucl. Instr. and Meth. B 13 (1986) 443.
18. A.A. Samarskii and A.V. Gulin, Numerical Methods (in Russian), Moscow, (Nauka, 1989).
19. H.H. Andersen and P. Sigmund, Nucl. Instr. and Meth. 38 (1965) 238.
20. T.W. Snouse and L.C. Haughney, J. Appl. Phys. 37 (1966) 700.
21. A. Southern, W. Willis and M. Robinson, J. Appl. Phys. 34 (1963) 153.
22. D. Onderdelinden, Appl. Phys. Lett. 8 (1966) 189.
23. V.E. Yurasova, J. Eksp. Teor. Fiz. 28 (1958) 1966.
24. A.S. Mosunov, I.I. Mosunov, L.B. Shelyakin and V.E. Yurasova, Proc. 5th Conf. on Interaction of Atomic Particles with Solids, Minsk, USSR (1978) p. 144.
25. R.A. Brizzolara and C.B. Cooper, Nucl. Instr. and Meth. B 43 (1989) 1366.