Surface roughness and sputtering yield of heavily ion implanted surfaces

Nuclear Inst. and Methods in Physics Research, B

Volumn 37-38, Issue C, 1989, Pages 325-328

  Nunogaki, M ^a   Uchida, M ^a   Kuratomi, Y ^a   Miyazaki, K ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; NEON; NITROGEN; SPUTTERING; SURFACES - ROUGHNESS MEASUREMENT;

DEPTH PROFILES; HEAVY ION; STAINLESS STEEL 316;

IRON AND ALLOYS;

EID: 0024607617     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(89)90196-1     Document Type: Article

References (7)

1. Energy Dependence of Sputtering Yield of Monatomic Solids
2. Energy Dependence of Sputtering Yield of Monatomic Solids
3. Plasma source nitriding