APPLICATION OF MATRIX ISOLATION SPECTROSCOPY TO THE MEASUREMENT OF SPUTTERING YIELDS.

J Vac Sci Technol

Volumn 16, Issue 2, 1979, Pages 251-254

  Steinbruchel, Christoph ^a   Gruen, Dieter M ^a   Dawson, Jane ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SPECTROSCOPY;

SPUTTERING;

EID: 0018443125     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.569921     Document Type: Article

References (0)