Ion-solid interactions during ion beam deposition of 74Ge and 30Si on Si at very low ion energies (0-200 eV range)

Nuclear Inst. and Methods in Physics Research, B

Volumn 13, Issue 1-3, 1986, Pages 250-258

  Herbots, N ^a   Appleton, B R ^a   Noggle, T S ^a   Zuhr, R A ^a   Pennycook, S J ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS - APPLICATIONS;

ATOMIC COLLISIONS; ION BEAM DEPOSITION; MONTE CARLO SIMULATIONS; TRIMSPUT;

FILMS;

EID: 0022024303     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(86)90512-4     Document Type: Article

References (12)

1. Ion-beam plating using mass-analyzed ions
2. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits
3. Thin-film deposition using low-energy ion beams (4) Ion source modification