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Volumn 30, Issue 2, 1983, Pages 1285-1290

Sputtering analysis with PIXE

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING;

EID: 0020113797     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/TNS.1983.4332511     Document Type: Article
Times cited : (8)

References (9)
  • 1
    • 0345934470 scopus 로고
    • Treatise on Materials Science and Technology
    • (Academic Press, New York)
    • J. K. Hirvonen, (ed), Treatise on Materials Science and Technology, (Academic Press, New York, 1980).
    • (1980)
    • Hirvonen, J.K.1
  • 4
    • 0242263451 scopus 로고
    • Sputtering by Ion Bombardment
    • Springer-Verlag, Berlin
    • H. H. Anderson and H.L. Bay, Sputtering by Ion Bombardment. (R. Behrisch, ed., Springer-Verlag, Verlag, Berlin, 1980).
    • (1980)
    • Anderson, H.H.1    Bay, H.L.2    Behrisch, R.3
  • 5
    • 0007903097 scopus 로고
    • Sputtering by Ion Bombardment
    • Springer-Verlag, Berlin
    • P. Sigmund, Sputtering by Ion Bombardment, (R. Behrisch, ed., Springer-Verlag, Berlin, 1980).
    • (1980)
    • Sigmund, P.1    Behrisch, R.2
  • 6
    • 0003621812 scopus 로고
    • Helium: Stopping Powers and Ranges in All Elemental Matter
    • (Pergamon Press, New York
    • J. F. Ziegler, (ed.), Helium: Stopping Powers and Ranges in All Elemental Matter, (Pergamon Press, New York, 1977).
    • (1977)
    • Ziegler, J.F.1
  • 7
    • 0013186126 scopus 로고
    • Atomic Data and Nuclear Data Tables, 515.
    • R. K. Gardner and Tom J. Gray, Atomic Data and Nuclear Data Tables 21,(1978) 515.
    • (1978) , vol.21 , pp. 515
    • Gardner, R.K.1    Gray, T.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.