Sputtering yield measurements during low energy xenon plasma bombardment

Journal of Applied Physics

Volumn 93, Issue 9, 2003, Pages 5816-5823

  Doerner, R P ^a   Whyte, D G ^b   Goebel, D M ^c  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

^c BOEING COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BERYLLIUM; BINDING ENERGY; CARBON; ION BOMBARDMENT; MOLYBDENUM; PLASMAS; TITANIUM;

SPUTTERING YIELDS;

SPUTTERING;

EID: 0037566663     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1566474     Document Type: Article

References (21)

1. J. J. Blandino, D. G. Goodwin, and C. E. Garner, Diamond Relat. Mater. 9, 1992 (2000).
2. D. Rosenberg and G. K. Wehner, J. Appl. Phys. 33, 1842 (1962).
3. C. H. Weijsenfeld, A. Hoogendoorn, and M. Koedam, Physica (Amsterdam) 27, 763 (1961).
4. P. C. Zalm, J. Appl. Phys. 54, 2660 (1983).
5. M. A. Mantenieks, P. K. Ray, and S. V. Shutthanandan, Proceedings of 27th International Electric Propulsion Conference, Pasadena, CA, Oct. 2001, pp. 15-19.
6. O. B. Duchemin and J. E. Polk, AIAA Pap., 99-2858 (1999).
7. D. M. Goebel, G. Campbell, and R. W. Conn, J. Nucl. Mater. 121, 277 (1984).
8. D. G. Whtye et al., Nucl. Fusion 41, 47 (2001).
9. R. Doerner and C. Mays, Fusion Eng. Des. 37, 325 (1997).
10. S. C. Luckhardt et al., J. Nucl. Mater. 266-269, 1285 (1999).
11. D. G. Whyte, R. Seraydarian, and R. P. Doerner, J. Vac. Sci. Technol. A 17, 2713 (1999).
12. F. C. Sze, R. P. Doerner, and S. Luckhardt, J. Nucl. Mater. 264, 89 (1999).
13. C. Kittel, Introduction to Solid State Physics (Wiley, New York, 1976).
14. H. P. Summers, Atomic Data and Analysis Structure-User Manual, Rep. JET-IR(94) (JET Joint Undertaking, Abingdon, 1994).
15. Sputtering by Particle Bombardment I, edited by R. Behrisch, Topics in Applied Physics, Vol. 47 (Springer, Berlin, 1981).
16. Sputtering by Particle Bombardment II, edited by R. Behrisch, Topics in Appl. Physics, Vol. 52 (Springer, Berlin, 1983).
17. M. A. Lennon et al., J. Phys. Chem. Ref. Data 17, 1285 (1988).
18. R. C. Isler et al., Phys. Plasmas 8, 4470 (2001).
19. A. Wucher, M. Wahl, and H. Oechsner, Nucl. Instrum. Methods Phys. Res. B 82, 337 (1993).
20. E. Vietzke et al., J. Nucl. Mater. 241-243, 810 (1997).
21. E. Vietzke et al., J. Nucl. Mater. 145-147, 425 (1987).