The sputtering of PtSi and NiSi

Nuclear Instruments and Methods

Volumn 132, Issue C, 1976, Pages 345-349

  Poate, J M ^a   Brown, W L ^a   Homer, R ^a   Augustyniak, W M ^a   Mayer, J W ^b   Tu, K N ^c   van der Weg, W F ^d  

^a LUCENT TECHNOLOGIES   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

^d PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

NICKEL SILICON ALLOYS - SPUTTERING; PLATINUM SILICON ALLOYS - SPUTTERING;

INTERMETALLICS;

EID: 49549129598     PISSN: 0029554X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0029-554X(76)90756-4     Document Type: Article

References (8)