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Applied Physics

Volumn 18, Issue 4, 1979, Pages 391-398

The sputtering mechanism for low-energy light ions

(4) Behrisch, R a Maderlechner, G a Scherzer, B M U a Robinson, M T b

a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK (Germany)

b OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

61.80; 79.20

Indexed keywords

SPUTTERING;

EID: 0018457373 PISSN: 03403793 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/BF00899693 Document Type: Article

Times cited : (70)

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