Statistics of sputtering

Nuclear Inst. and Methods in Physics Research, B

Volumn 33, Issue 1-4, 1988, Pages 489-492

  Eckstein, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; GASES, INERT; HYDROGEN; MATHEMATICAL STATISTICS--MONTE CARLO METHODS; NICKEL AND ALLOYS--RADIATION EFFECTS;

MONTE CARLO PROGRAM; MONTE CARLO SIMULATION; NEGATIVE BINOMIAL DISTRIBUTION; SOFTWARE PACKAGE TRIM SP; SPUTTERING PROBABILITY;

SPUTTERING;

EID: 0024018104     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(88)90614-3     Document Type: Article

References (15)

1. Correlation functions in the theory of atomic collision cascades: Ion location and the distribution in depth and size of damage clusters
2. Computer studies of the reflection of light ions from solids