Sputtering of Au and Al2O3 surfaces by slow highly charged ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 182, Issue 1-4, 2001, Pages 143-147

  Hayderer, G ^a   Cernusca, S ^a   Hoffmann, V ^b   Niemann, D ^b   Stolterfoht, N ^b   Schmid, M ^a   Varga, P ^a   Winter, HP ^a   Aumayr, F ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Highly charged ions; Ions surface interaction; Multiply charged ions; Nanopattering of surfaces; Potential sputtering; Surface modification

Indexed keywords

ALUMINA; CRYSTAL DEFECTS; ELECTRON ENERGY LEVELS; GOLD; IMPACT IONIZATION; POLYCRYSTALLINE MATERIALS; SPUTTERING; SURFACE PHENOMENA;

MULTIPLE CHARGED IONS; POTENTIAL SPUTTERING (PS);

ION BOMBARDMENT;

EID: 0035417328     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00668-1     Document Type: Conference Paper

References (18)