The effect of the fibre target structure on the spatial distributions of sputtered atoms

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 115, Issue 1-4, 1996, Pages 482-484

  Eckstein, W ^a   Mashkova, E S ^b   Molchanov, V A ^b   Tolmachev, A I ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; COPPER; IONS; SPUTTERING; SURFACES; TARGETS;

FIBER TARGET STRUCTURE; ION INCIDENCE; SPUTTERED PARTICLES;

ION BOMBARDMENT;

EID: 0030564499     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01560-4     Document Type: Article

References (6)

1. R. Behrisch, ed., Sputtering by Particle Bombardment I (Springer, Berlin, 1981).
2. E.S. Mashkova and V.A. Molchanov, Radiat. Eff. Defects in Solids 108 (1989) 307.
3. G. Betz and K. Wien, Int. J. Mass Spectrom. Ion Processes 140 (1994) 1.
4. R. Behrisch and K. Wittmaack, eds., Sputtering by Particle Bombardment III (Springer, Berlin, 1991).
5. W. Eckstein, E.S. Mashkova, V.A. Molchanov, A.I. Sidorov and Yu.N. Zhukova, Appl. Phys. A 57 (1993) 271.
6. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, Berlin, 1991).