Cantilever-based biosensors

Analytical and Bioanalytical Chemistry

Volumn 379, Issue 7-8, 2004, Pages 946-959

  Ziegler, Christiane ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

Biosensor; Cantilever; Micromechanical sensor

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; DIFFERENTIAL EQUATIONS; EIGENVALUES AND EIGENFUNCTIONS; ELASTIC MODULI; INTEGRATED CIRCUITS; MICROMACHINING; RESONANCE;

BIOLOGICAL APPLICATIONS; CANTILEVER; MICROMECHANICAL SENSORS; SCANNING FORCE MICROSCOPY (SFM);

BIOSENSORS;

EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; MATHEMATICS; METHODOLOGY; REVIEW; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTY; THEORETICAL MODEL;

BIOSENSING TECHNIQUES; EQUIPMENT DESIGN; MATHEMATICS; MODELS, THEORETICAL; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTIES;

EID: 14844362642     PISSN: 16182642     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00216-004-2694-y     Document Type: Review

References (169)

1. Binnig G, Quate CF, Gerber C (1986) Phys Rev Lett 56(9):930-933
2. Haehner G, Marti A, Spencer ND (1997) Tribology Lett 3(4):359-365
3. OLYMPUS OPTICAL CO. LTD. (2002) http://www.olympus.co.jp/probe/index. html. Cited 2002
4. NANOSENSORS GmbH and Co. KG (2002) http://www.nanosensors.com/products. htm
5. NT-MDT Co. (2002) http://www.ntmdt.ru/
6. MikroMasch (2002) http://www.spmtips.com/
7. NanoDevices Inc. (2002) http://www.nanodevices.com
8. TM Microscopes (2002) http://www.spmprobes.com/
9. Ono M, Lange D, Brand O, Hagleitner C, Baltes H (2002) Ultramicroscopy 91(1-4):9-20
10. Lange D, Akiyama T, Hagleitner C, Tonin A, Hidber HR, Niedermann P, Staufer U, De Rooij NF, Brand O, Baltes H (1999) IEEE international conference on micro electro mechanical systems, technical digest, 12th ed, Orlando, 17-21 January 1999, pp 447-452
11. Hagleitner C, Lange D, Akiyama T, Tonin A, Vogt R, Baltes H (1999) Proceedings of SPIE: the international society for optical engineering. Smart Electronics MEMS 3673:240-248
12. Franks W, Lange D, Lee S, Hierlemann A, Spencer N, Baltes H (2002) Ultramicroscopy 91(1-4):21-27
13. Takahashi H, Ando K, Shirakawabe Y (2002) Ultramicroscopy 91(1-4):63-72
14. Satoh N, Kobayashi K, Watanabe S, Fujii T, Horiuchi T, Yamada H, Matsushige K (2002) Appl Surface Sci 188(3-4):425-429
15. Rangelow IW, Grabiec P, Gotszalk T, Edinger K (2002) Surface Interface Anal 33(2):59-64
16. Miyahara Y, Deschler M, Fujii T, Watanabe S, Bleuler H (2002) Appl Surface Sci 188(3-4):450-455
17. Thaysen J, Boisen A, Hansen O, Bouwstra S (2000) Sens Actuators 83:47-53
18. Schäffer TF (2002) J Appl Phys 91(7):4739-4746
19. Chand A, Viani MB, Schäffer TE, Hansma PK (2000) J Microelectromech Syst 9(1): 112-116
20. Schäffer TE, Viani M, Walters DA, Drake B, Runge EK, Cleveland JP, Wendman MA, Hansma PK (1997) SPIE 3009:48-52
21. Viani MB, Schäffer TE, Chand A, Rief M, Gaub HE, Hansma PK (1999) J Appl Phys 86(4):2258-2262
22. Viani MB, Schäffer TE, Paloczi GT, Pietrasanta LI, Smith BL, Thompson JB, Richter M, Rief M, Gaub HE, Plaxco KW, Cleland AN, Hansma HG, Hansma PK (1999) Rev Sci Instrum 70(11):4300-4303
23. Walters DA, Viani M, Paloczi GT, Schäffer TE, Cleveland JP, Wendman MA, Gurley G, Ellings V, Hansma PK (1998) SPIE 3009:43-47
24. Bachels T, Schäfer R (1998) Rev Sci Instrum 69(11):3794-3797
25. Hoummady M, Fujita H (1999) Nanotechnology 10:29-33
26. Chow EM, Yaralioglu GG, Quate CF, Kenny TW (2002) Appl Phys Lett 80(4):664-666
27. Abedinov N, Grabiec P, Gotszalk T, Ivanov T, Voigt J, Rangelow IW (2001) J Vac Sci Technol A 19(6):2884-2888
28. Vettiger P, Despont M, Drechsler U, Dürig U, Häberle W, Lutwyche MI, Rothuizen HE, Sturz R, Widmaer R, Binnig GK (2000) IBM J Res Dev 44(3):323-340
29. Dürig U, Cross G, Despont M, Drechsler U, Haberle W, Lutwyche MI, Rothuizen H, Stutz R, Widmer R, Vettiger P, Binnig GK, King WP, Goodson KE (2000) Tribol Lett 9(1,2):25-32
30. Vettiger P, Brugger J, Despont M, Drechsler U, Dürig U, Haberle W, Lutwyche M, Rothuizen H, Stutz R, Widmer R, Binnig G (1999) Microelectron Eng 46(1-4):11-17
31. Zhao Y, Mao M, Horowitz R, Majumdar A, Varesi J, Norton P, Kitching J (2002) J Microelectromech Syst 11 (2): 136-146
32. Lange D, Hagleitner C, Hierlemann A, Brand O, Baltes H (2002) Anal Chem 74(13):3084-3095
33. McKendry R, Zhang J, Arntz Y, Strunz T, Hegner M, Lang HP, Baller MK, Certa U, Meyer E, Guntherodt H-J, Gerber C (2002) Proc Natl Acad Sci USA 99(15):9783-9788
34. Weaver W, Timoschenko SP, Young DH (1990) Vibration Probl Eng
35. Brand O, Baltes H (1998) In: Baltes H, Göpel W, Hesse J (eds) Sensors update, vol 4. VCH, Weinheim, pp 3-51
36. Butt H-J, Jaschke M (1995) Nanotechnology 6:1-7
37. Elevin RD (1979) Formulas for natural frequencies and mode shapes. Van Rostrand Reinhold, New York
38. Neumeister JM, Ducker WA (1994) Rev Sci Instrum 65(8):2527-2532
39. Sader JE (1995) Rev Sci Instrum 66(9):4583-4587
40. Sader JE, Larson I, Mulvaney P, White LR (1995) Rev Sci Instrum 66(7):3789-3798
41. Sader JE, Chon JWM, Mulvaney P (1999) Rev Sci Instrum 70(10):3967-3969
42. Sader JE, White L (1994) J Appl Phys 74(1):1-9
43. Lévy R, Maaloum M (2002) Nanotechnology 13:33-37
44. Holbery JD, Eden VL, Sarikaya M, Fisher RM (2000) Rev Sci Instrum 71(10):3769-3776
45. Butt H-J, Siedle P, Seifert K, Fendler K, Seeger T, Bamberg A, Weisenhorn AL, Goldie K, Engel A (1993) J Microsc 169(1):75-84
46. Senden TJ, Ducker WA (1994) Langmuir 10(4): 1003-1004
47. Florin E-L, Moy VT, Gaub HE (1994) Science 264:415-417
48. Li YQ, Tao NJ, Pan J, Garcia AA, Lindsay SM (1993) Langmuir 9(3):637-641
49. Hutter JL, Bechhoefer J (1993) Rev Sci Instrum 64(7):1868-1873
50. Cleveland JP, Manne S, Bocek D, Hansma PK (1993) Rev Sci Instrum 64(2):403-405
51. Asylum research (2002) http://www.asylumresearch.com/ QuantMolecForcesAbstract.pdf
52. Albrecht TR, Grütter P, Hörne D, Rugar D (1991) J Appl Phys 69(2):668-673
53. Lange D (2000) Cantilever-based microsystems for gas sensing and atomic force microscopy
54. Mehner J, Kurth S, Billep D, Kaufmann C, Kehr K, Dötzel W (1998) In: Proceedings of IEEE micro electro mechanical systems (MEMS), pp 240-245
55. Kokobun K, Hirata M, Ono M, Murakami H, Toda Y (1987) J Vac Sci Technol A 5:2450-2453
56. Landau LD, Lifshitz EM (1959) Fluid mechanics, New York
57. Chen GY, Warmack RJ, Thundat T, Allison DP, Huang A (1994) Rev Sci Instrum 65(8):2532-2537
58. Blom FR, Bouwstra S, Elwenspoek M, Fluitman JHJ (1992) J Vac Sci Technol B 10(1):19-26
59. Sader JE (1998) J Appl Phys 84(1):64-76
60. Shih WY, Li X, Gu H, Shih W-H, Aksay IA (2001) J Appl Phys 89(2): 1497-1505
61. Rast S, Wattinger C, Gysin U, Meyer E (2000) Rev Sci Instrum 71(7):2772-2775
62. Anczykowski B, Cleveland JP, Krüger D, Ellings V, Fuchs H (1998) Appl Phys A 66:S885-S889
63. Sulchek T, Hsieh R, Adams JD, Yaralioglu GG, Minne SC, Quate CF, Cleveland JP, Atalar A, Adderton DM (2000) Appl Phys Lett 76(11):14731-14735
64. Tamayo J, Humphris ADL, Miles MJ (2000) Appl Phys Lett 77(4):582-585
65. Sauerbrey G (1959) Zeitschrift für Physik 155:206-222
66. Eichelbaum F, Borngräber R, Lucklum R, Hauptmann P, Rösler S (1998) Technisches Messen 65:434-444
67. Vidic A, Then D, Ziegler C (2002) (submitted)
68. Chen GY, Thundat T, Wachter EA, Warmack RJ (1995) J Appl Phys 77(8):3618-3622
69. Stoney GG (1909) Proc R Soc Lond A82:172
70. Honda T, Arai KI, Yamaguchi M (1994) J Appl Phys 76(10):6994-6999
71. Hu Z, Thundat T, Warmack RJ (2001) J Appl Phys 90(1):427-431
72. Barnes JR, Stephenson RJ, Woodburn CN, O'Shea SJ, Welland ME, Rayment T, Gimzewski JK, Geber C (1994) Rev Sci Instrum 65(12):3793-3798
73. Berger R, Gerber C, Lang HP, Gimzewski JK (1997) Microelectron Eng 35:373-379
74. Mertens J, Finot E, Thundat T, Fabre A, Nadal M-H, Eyraud V, Bourillot E (2003) Ultramicrsocopy 97:119-126
75. Meyer G, Amer NM (1988) Appl Phys Lett 53(12):1045-1047
76. Erlandsson R, McClelland GM, Mate CM, Chiang S (1988) J Vac Sci Technol A 6(2):266-270
77. Putman CAJ, Grooth BGD, Hulst NFV, Greve J (1992) J Appl Phys 72(1):6-12
78. Martin Y, Williams CC, Wickramasinghe HK (1987) J Appl Phys 61(10):4723-4729
79. Rugar D, Mamin HJ, Guethner P (1989) Appl Phys Lett 55(25):2588-2590
80. Blanc N, Brugger J, Rooij NFd, Dürig U (1996) J Vac Sci Technol B 14(2):901-905
81. Shiba Y, Ono T, Minami K, Esashi M (1998) Transact Inst Electrical Eng Jpn 118E(12):647-651
82. Brugger J, Blanc N, Renaud P, Rooij NFd (1994) Sens Actuators A 43(1-3):339-345
83. Raiteri R, Grattarola M, Berger R (2002) Materialstoday:22-29
84. Yaralioglu GG, Atalar A, Manalis SR, Quate CF (1998) J Appl Phys 83(12):7405-7415
85. Manalis SR, Minne SC, Atalar A (1996) Appl Phys Lett 69(25):3944-3946
86. Perazzo T, Mao M, Kwon O, Majumdar A, Varesi JB, Norton P (1999) Appl Phys Lett 74(23):3567-3569
87. Manalis SR, Minne SC, Quate CF, Yaralioglu GG, Atalar A (1997) Appl Phys Lett 70(24):3311-3313
88. Thundat T, Finot E, Hu Z, Ritchie RH, Wu G, Majumdar A (2000) Appl Phys Lett 77(24):4061-4063
89. Tortonese M, Barrett RC, Quate CF (1993) Appl Phys Lett 62(8):834-836
90. Linnemann R, Gotszalk T, Hadjiiski L, Rangelow IW (1995) Thin Solid Films 264(2):159-164
91. Minne SC, Manalis SR, Quate CF (1995) Appl Phys Lett 67(26):3918-3920
92. Chui BW, Stone TD, Kenny TW, Mamin HJ, Terris BD, Rugar D (1996) Appl Phys Lett 69(18):2767-2769
93. Hansen O, Boisen A (1999) Nanotechnology 10:51-60
94. Rasmussen PA, Thaysen J, Hansen O, Eriksen SC, Boisen A (2003) Ultramicroscopy 97:371-376
95. Marie R, Thaysen J, Christensen CBV, Boisen A (2003) Ultramicroscopy 97:893-898
96. Thaysen J, Yalcinkaya AD, Vettiger P, Menon A (2002) J Phys D 35:2698-2703
97. Lee SS, White RM (1996) Sens Actuators A 52:41-45
98. Manalis SR, Minne SC, Atalar A, Quate CF (1996) Rev Sci Instrum 67(9):3294-3297
99. Indermühle P-F, Schürmann G, Racine G-A, Rooij NFd (1997) J Micromech Microeng 7:218-220
100. Lee C, Itoh T, Ohashi T, Maeda R, Suga T (1997) J Vac Sci Technol B 15(4): 1559-1563
101. Han W, Lindsay SM, Jing T (1996) Appl Phys Lett 69(26):4111-4113
102. Lantz MA, O'Shea SJ, Welland ME (1994) Appl Phys Lett 65(4):409-411
103. Florin E-L, Radmacher M, Fleck B, Gaub HE (1994) Rev Sci Instrum 65(3):639-643
104. Schemmel A, Gaub HE (1999) Rev Sci Instrum 70(2):1313-1317
105. Revenko I, Proksch R (2000) J Appl Phys 87(1):526-533
106. Sarraute E, Dufour I (1999) International conference on modeling and simulation of microsystems, vol. xviii. Puerto Rico, San Juan, 19-21 April 1999, pp 266-269
107. Dufour M, Delaye MT, Michel F, Danel JS, Diem B, Delapierre G (1992) Sens Actuators A 34:201-209
108. Buguin A, Roure OD, Silberzan P (2001) Appl Phys Lett 78(19):2982-2984
109. Lange D, Brand O (2002) Multipurpose sensors based on measurements of magnetic-field or electric-field deflection of cantilevers, Ep 1197726
110. Tsuchitani S, Kaneko R (1998) Transact Inst Electrical Eng Jpn 118-E(1):6-13
111. Cunningham DF, Jenkins L, Khalid MAH (1997) Sens Actuators A 63(2):125-128
112. Attia P, Boutry M, Bosseboeuf A, Hesto P (1998) Microelectron J 29(9):641-644
113. Abadal G, Davis ZJ, Helbo B, Borrise X, Ruiz R, Boisen A, Campabadal F, Esteve J, Figueras E, Perez-Murano F, Barniol N (2001) Nanotechnology 12(2):100-104
114. Akiyama T, Staufer U, de Rooij NF, Lange D, Hagleitner C, Brand O, Baltes H, Tonin A, Hidber HR (2000) J Vac Sci Technol B 18(6):2669-2675
115. Then D (2002) Miniaturisierte massensensitive Sensoren und deren Anwendung in der Gas- und Flüssigkeitsanalytik, PhD Thesis, Universität Kaiserslautern
116. Kim BH, Kern DP, Raible S, Weimar U (2002) Microelectron Eng 61-62:947-953
117. Su X, Dai C, Zhang J, O'Shea SJ (2002) Biosens Bioelectron 17:111-117
118. Then D, Ziegler C Cantilever-based Sensors. In: Nalwa HS (ed) Encyclopedia of nanoscience and nanotechnology (in press)
119. Ultramicroscopy 97 (2003) Special issue. In: Proceedings of the 4th international conference on scanning probe microscopy, sensors and nanostructures, Las Vegas, 2002
120. Thundat T, Oden PI, Warmack RJ (1997) Microscale Thermophys Eng 1:185-199
121. Berger R, Delamarche E, Lang HP, Gerber C, Gimzewski JK (1997) Science 276(5321):2021-2024
122. Raiteri R, Grattarola M, Butt H-J, Skládal P (2001) Sens Actuators B 79:115-126
123. Yan X, Lvov Y, Ji H-F, Singh A, Thundat T (2003) Org Biomol Chem 1:460-462
124. Raiteri R, Butt H-J (1995) J Phys Chem 99:15728-15732
125. O'Shea SJ, Welland ME, Brunt TA, Ramadan AR, Rayment T (1996) J Vac Sci Technol B 14(2):1383-1385
126. Lahav M, Durkan C, Gabai R, Katz E, Willner I, Welland ME (2001) Angew Chem 113(21):4219-4221
127. Butt H-J (1996) J Colloid Interf Sci 180:251-60
128. Fritz J, Baller MK, Lang HP, Strunz T, Meyer E, Güntherodt H-J, Delamarche E, Gerber C, Gimzewski JK (2000) Langmuir 16:9694-9696
129. Ji H-F, Hansen KM, Hu Z, Thundat T (2001) Sens Actuators B 72(3):233-238
130. Xu X, Thundat TG, Brown GM, Ji H-F (2002) Anal Chem 74(15):3611-3615
131. Ji H-F, Finot E, Dabestani R, Thundat T, Brown GM, Britt PF (2000) Chem Commun 457-458
132. Ji H-F, Thundat T (2002) Biosens Bioelectron 17(4):337-343
133. Zhang Y, Ji H-F, Brown GM, Thundat T (2003) Anal Chem 75:4773-4777
134. Cherian S, Gupta RK, Mullin BC, Thundat T (2003) Biosens Bioelectron 19:411-416
135. Boisen A, Thaysen J, Jensenius H, Hansen O (2000) Ultramicroscopy 82(1-4):11-16
136. Cherian S, Thundat T (2002) Appl Phys Lett 80(12):2219-2221
137. Tipple CA, Lavrik NV, Culha M, Headrick J, Datskos P, Sepaniak MJ (2002) Anal Chem 74(13):3118-3126
138. Baselt DR, Lee GU, Colton RJ (1996) J Vac Sci Technol B 14(2):789-793
139. Baselt DR, Lee GU, Hansen KM, Chrisey LA, Colton RJ (1997) Proc IEEE 85(4):672-682
140. Baselt DR, Lee GU, Natesan M, Metzger SW, Sheenhan PE, Colton RJ (1998) Biosens Bioelectron 13:731-739
141. Antonik MD, D'Costa NP, Hoh JH (1997) IEEE Eng Med Biol 16:66-72
142. Baller MK, Lang HP, Fritz J, Gerber C, Gimzewski JK, Drechsler U, Rothuizen H, Despont M, Vettiger P, Battiston FM, Ramseyer JP, Fornaro P, Meyer E, Güntherodt H-J (2000) Ultramicroscopy 82(1-4):1-9
143. Fritz J, Baller MK, Lang HP, Strunz T, Meyer E, Güntherodt H-J, Delamarche E, Gerber C, Gimzewski JK (2000) Langmuir 16(25):9694-9696
144. Moulin AM, O'Shea SJ, Welland ME (2000) Ultramicroscopy 82(1-4):23-31
145. Moulin AM, O'Shea SJ, Badley RA, Doyle P, Welland ME (1999) Langmuir 15(26):8776-8779
146. Grogan C, Raiteri R, O'Connor GM, Glynn TJ, Cunningham V, Kane M, Charlton M, Leech D (2003) Biosens Bioelectron 17:201-207
147. Wu G, Datar RH, Hansen KM, Thundat T, Cote RJ, Majumdar A (2001) Nat Biotechnol 19:856-860
148. Raiteri R, Nelles G, Butt H-J, Knoll W, Skládal P (1999) Sens Actuators B 61:213-217
149. Yang Y, Ji H-F, Thundat T (2003) J Am Chem Soc 125:1124-1125
150. Dutta P, Tipple CA, Lavrik NV, Datskos PG, Hofstetter H, Hofstetter O, Sepaniak MJ (2003) Anal Chem 75:2342-2348
151. Pei J, Tian F, Thundat T (2004) Anal Chem 76:292-297
152. Thaysen J, Marie R, Boisen A (2001) In: International conference of micro electro mechanical systems. Interlaken, pp 401-404
153. Marie R, Jensenius H, Thaysen J, Christensen CB, Boisen A (2002) Ultramicroscopy 91(1-4):29-36
154. Fritz J, Baller MK, Lang HP, Rothuizen H, Vettiger P, Meyer E, Güntherodt H-J, Gerber C, Gimzewski JK (2000) Science 288(5464):316-318
155. Hansen KM, Ji H-F, Wu G, Datar R, Cote R, Majumdar A, Thundat T (2001) Anal Chem 73(7):1567-1571
156. Personal communication
157. Weigert S, Dreier M, Hegner M (1996) Appl Phys Lett 69(19):2834-2836
158. Ilic B, Czaplewski D, Craighead HG, Neuzil P, Campagnolo C, Batt C (2000) Appl Phys Lett 77(3):450-452
159. Prescesky S, Parameswaran M, Rawicz A, Turner RFB, Reichl U (1992) Can J Phys 70:1178-1183
160. Lee JH, Yoon KH, Hwang KS, Park J, Ahn S, Kim TS (2001) Preprint
161. Tamayo J, Humphris ADL, Malloy AM, Miles MJ (2001) Ultramicroscopy 86(1/2):167-173
162. Arakawa ET, Lavrik NV, Rajic S, Datskos PG (1993) Ultramicroscopy 97:459-465
163. Hagleitner C, Hierlemann A, Lange D, Kummer A, Kerness N, Brane O, Baltes H (2001) Nature (London, United Kingdom) 414(6861):293-296
164. Lutwyche M, Andreoli C, Binnig G, Brugger J, Drechsler U, Haberle W, Rohrer H, Rothuizen H, Vettiger P, Yaralioglu G, Quate C (1999) Sens Actuators A A73(1-2):89-94
165. Binnig G, Despont M, Drechsler U, Haberle W, Lutwyche M, Vettiger P, Mamin HJ, Chui BW, Kenny TW (1999) Appl Phys Lett 74(9):1329-1331
166. Roger JP, Boccara AC, Potier M-C, Guirardel M, Bergaud C (2001) In: Proceedings of SPIE: the international society for optical engineering. Hybrid Novel Imaging New Opt Instrum Biomed Appl 4434:138-141
167. Perazzo T, Mao M, Kwon O, Majumdar A, Varesi JB, Norton P (1999) Appl Phys Lett 74(23):3567-3569
168. Abadal G, Davis ZJ, Helbo B, Borrise X, Ruiz R, Boisen A, Campabadal F, Esteve J, Figureras E, Perez-Murano F, Barniol N (2001) Nanotechnology 12:1-5
169. Davis ZJ, Abadal G, Kuhn O, Hansen O, Grey F, Boisen A (2000) J Vac Sci Technol B 17(2):612-616