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Journal of Microelectromechanical Systems

Volumn 11, Issue 2, 2002, Pages 136-146

Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance

(7) Zhao, Yang a Mao, Minyao a,b Horowitz, Roberto a Majumdar, Arunava a Varesi, John c Norton, Paul d Kitching, John e,f

a UNIVERSITY OF CALIFORNIA (United States)

b JDS UNIPHASE (United States)

c Santa Barbara Research Center (United States)

d IR Vision (United States)

e NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

f UNIVERSITY OF COLORADO (United States)

Author keywords

Focal plane array (FPA); Infrared; Interdigited fingers; Microcantilever array; Microfabrication; Optomechanical; Uncooled

Indexed keywords

CHARGE COUPLED DEVICES; GOLD; IMAGING SYSTEMS; INFRARED IMAGING; INFRARED RADIATION; INTEGRATED CIRCUIT LAYOUT; PERFORMANCE; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; THERMAL EXPANSION; THERMAL NOISE; TRANSDUCERS;

CANTILEVER DEFLECTION; FOCAL PLANE ARRAY; INFRARED ABSORBERS; INTERDIGITED FINGERS; MICRO-OPTOMECHANICAL INFRARED IMAGING SYSTEMS; MICROCANTILEVER ARRAY; MICROFABRICATION; OPTICAL READOUT SYSTEM; THERMOMECHANICAL TRANSDUCER; WAVE OPTICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036540173 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.993448 Document Type: Article

Times cited : (235)

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