-
1
-
-
0029407625
-
-
H.J. Mamin, B.D. Terris, L.S. Fan, S. Hoen, R.C. Barrett and D. Rugar, IBM J. Res. Develop. 39 (1995) 681.
-
(1995)
IBM J. Res. Develop.
, vol.39
, pp. 681
-
-
Mamin, H.J.1
Terris, B.D.2
Fan, L.S.3
Hoen, S.4
Barrett, R.C.5
Rugar, D.6
-
2
-
-
0033092584
-
-
G. Binnig, M. Despont, U. Drechsler, W. Häberle, M. Lutwyche, P. Vettiger, H.J. Mamin, B.W. Chui and T.W. Kenny, Appl. Phys. Lett. 74 (1999) 1329.
-
(1999)
Appl. Phys. Lett.
, vol.74
, pp. 1329
-
-
Binnig, G.1
Despont, M.2
Drechsler, U.3
Häberle, W.4
Lutwyche, M.5
Vettiger, P.6
Mamin, H.J.7
Chui, B.W.8
Kenny, T.W.9
-
3
-
-
0033704649
-
-
P. Vettiger, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M.I. Lutwyche, H.E. Rothuizen, R. Stutz, R. Widmer and G.K. Binnig, IBM J. Res. Develop. 44 (2000) 323.
-
(2000)
IBM J. Res. Develop.
, vol.44
, pp. 323
-
-
Vettiger, P.1
Despont, M.2
Drechsler, U.3
Dürig, U.4
Häberle, W.5
Lutwyche, M.I.6
Rothuizen, H.E.7
Stutz, R.8
Widmer, R.9
Binnig, G.K.10
-
5
-
-
0031344594
-
-
R.P. Ried, H.J. Mamin, B.D. Terris, L.S. Fan and D. Rugar, J. Microelectromech. Syst. 6 (1997) 294.
-
(1997)
J. Microelectromech. Syst.
, vol.6
, pp. 294
-
-
Ried, R.P.1
Mamin, H.J.2
Terris, B.D.3
Fan, L.S.4
Rugar, D.5
-
6
-
-
0001520375
-
-
B.W. Chui, H.J. Mamin, B.D. Terris, T.D. Stowe, D. Rugar and T.W. Kenny, Appl. Phys. Lett. 69 (1996) 2767.
-
(1996)
Appl. Phys. Lett.
, vol.69
, pp. 2767
-
-
Chui, B.W.1
Mamin, H.J.2
Terris, B.D.3
Stowe, T.D.4
Rugar, D.5
Kenny, T.W.6
-
7
-
-
0032023865
-
-
B.W. Chui, T.D. Stowe, YS. Ju, K.E. Goodson, T.W. Kenny, H.J. Mamin, B.D. Terris, R.P. Ried and D. Rugar, J. Microelectromech. Syst. 7 (1998) 69.
-
(1998)
J. Microelectromech. Syst.
, vol.7
, pp. 69
-
-
Chui, B.W.1
Stowe, T.D.2
Ju, Y.S.3
Goodson, K.E.4
Kenny, T.W.5
Mamin, H.J.6
Terris, B.D.7
Ried, R.P.8
Rugar, D.9
-
8
-
-
0012077725
-
-
eds. A.P. Lee, L. Lin, F.K. Forster, Y.C. Young, K. Goodson and R.S. Keynton ASME Press, New York
-
W.P. King and K.E. Goodson, in: Microelectromechanical Systems (MEMS) 1999, Vol. 1, eds. A.P. Lee, L. Lin, F.K. Forster, Y.C. Young, K. Goodson and R.S. Keynton (ASME Press, New York, 1999) pp. 583-588.
-
(1999)
Microelectromechanical Systems (MEMS) 1999
, vol.1
, pp. 583-588
-
-
King, W.P.1
Goodson, K.E.2
-
9
-
-
0009393931
-
-
Yokohama, Japan, 7-10 June
-
N.C. MacDonald, in: Digest of Technical Papers, 7th Int. Conf. Solid-State Sensors and Actuators, Yokohama, Japan, 7-10 June 1993, pp. 8-12.
-
(1993)
Digest of Technical Papers, 7th Int. Conf. Solid-State Sensors and Actuators
, pp. 8-12
-
-
MacDonald, N.C.1
-
10
-
-
0000212074
-
-
S.C. Minne, G. Yaralioglu, S.R. Manalis, J.D. Adams, A. Atalar and C.F. Quate, Appl. Phys. Lett. 72 (1998) 2340.
-
(1998)
Appl. Phys. Lett.
, vol.72
, pp. 2340
-
-
Minne, S.C.1
Yaralioglu, G.2
Manalis, S.R.3
Adams, J.D.4
Atalar, A.5
Quate, C.F.6
-
11
-
-
0041440848
-
-
Hilton Head, SC, 4-8 June Transducers Research Foundation, Cleveland, OH, in press
-
W.P. King, T.W. Kenny, K.E. Goodson, G. Cross, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G.K. Binnig and P. Vettiger, in: Proc. 2000 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 4-8 June 2000 (Transducers Research Foundation, Cleveland, OH), in press.
-
(2000)
Proc. 2000 Solid-State Sensor and Actuator Workshop
-
-
King, W.P.1
Kenny, T.W.2
Goodson, K.E.3
Cross, G.4
Despont, M.5
Drechsler, U.6
Dürig, U.7
Häberle, W.8
Lutwyche, M.9
Rothuizen, H.10
Stutz, R.11
Widmer, R.12
Binnig, G.K.13
Vettiger, P.14
-
12
-
-
0032640075
-
-
Orlando, FL, January 1999 IEEE, Piscataway
-
M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer and P. Vettiger, in: IEEE Int. Micro Electro Mechanical Systems Technical Digest 1999 (MEMS 99), Orlando, FL, January 1999 (IEEE, Piscataway, 1999) pp. 564-569.
-
(1999)
IEEE Int. Micro Electro Mechanical Systems Technical Digest 1999 (MEMS 99)
, pp. 564-569
-
-
Despont, M.1
Brugger, J.2
Drechsler, U.3
Dürig, U.4
Häberle, W.5
Lutwyche, M.6
Rothuizen, H.7
Stutz, R.8
Widmer, R.9
Binnig, G.10
Rohrer, H.11
Vettiger, P.12
-
13
-
-
0001405488
-
-
eds. L.T. Romankiw, S. Krongelb and C.H. Ahn Electrochemical Society, Pennington
-
M. Lutwyche, U. Drechsler, W. Häberle, H. Rothuizen, R. Widmer and P. Vettiger, in: Magnetic Materials, Processes, and Devices. Application to Storage and Micromechanical Systems (MEMS), Vol. 98-20, eds. L.T. Romankiw, S. Krongelb and C.H. Ahn (Electrochemical Society, Pennington, 1999) pp. 423-433.
-
(1999)
Magnetic Materials, Processes, and Devices. Application to Storage and Micromechanical Systems (MEMS)
, vol.98
, Issue.20
, pp. 423-433
-
-
Lutwyche, M.1
Drechsler, U.2
Häberle, W.3
Rothuizen, H.4
Widmer, R.5
Vettiger, P.6
-
14
-
-
0041942307
-
-
San Francisco, CA IEEE, Piscataway
-
M.I. Lutwyche, G. Cross, M. Despont, U. Drechsler, U. Dürig, W. Häberle, H. Rothuizem, R. Stutz, R. Widmer, G.K. Binnig and P. Vettiger, in: Digest of Technical Papers IEEE Int. Solid-State Circuits Conf. ISSCC 2000, San Francisco, CA (IEEE, Piscataway, 2000) pp. 802-803.
-
(2000)
Digest of Technical Papers IEEE Int. Solid-State Circuits Conf. ISSCC 2000
, pp. 802-803
-
-
Lutwyche, M.I.1
Cross, G.2
Despont, M.3
Drechsler, U.4
Dürig, U.5
Häberle, W.6
Rothuizem, H.7
Stutz, R.8
Widmer, R.9
Binnig, G.K.10
Vettiger, P.11
|