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Volumn 69, Issue 11, 1998, Pages 3794-3797

Microfabricated cantilever-based detector for molecular beam experiments

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EID: 0000142451 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.1149180 Document Type: Article

Times cited : (23)

References (13)

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- note
- Sn value limits the accuracy of the film thickness measurement to ±20%.

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