Capacitive AFM Probe for High Speed Imaging

IEEJ Transactions on Sensors and Micromachines

Volumn 118, Issue 12, 1998, Pages 647-651

  Shiba, Yuji ^a   Ono, Takahito ^a   Minami, Kazuyuki ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

capacitive AFM probe; high speed imaging; micromachining; narrow gap

Indexed keywords

EID: 0142194519     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.118.647     Document Type: Article

References (8)

1. S. Akamine, T. R. Albrecht, M. J. Zdeblick and C. F. Quate: IEEE Electron Device Lett. 10, 490 (1996).
2. M. Ohtsu, K. Minami, and M. Esashi: Technical Digest of the 14 th Sensor Symposium, 163 (1996).
3. Deron A. Walter et al.: SPIE Vol. 3009, 43-47 (1997).
4. N. A. Burnham and R. J. Colton: J. Vac. Sci. Technol. A7, 2906 (1989).
5. C. Cabuz, K. Fukatsu, T. Kurabayashi, K. Minami and M. Esashi: IEEE J. Micromech. Systems 4, 109 (1995).
6. M. Ohtsu, K. Minami, and M. Esashi: MEMS 96, San Diego, 228 (1996).
7. N. Blanck, J. Brugger and N.F. De Rooij: Forces in the Scanning Probe Methods, 79-84 (1995).
8. Masayoshi Esashi: IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, 609-614 (1996).