Infrared vision using uncooled micro-optomechanical camera

Applied Physics Letters

Volumn 74, Issue 23, 1999, Pages 3567-3569

  Perazzo, T ^a   Mao, M ^a   Kwon, O ^a   Majumdar, A ^a   Varesi, J B ^b   Norton, P ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Santa Barbara Research Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHEMICAL VAPOR DEPOSITION; MICROOPTICS; OPTICAL SENSORS; SEMICONDUCTING SILICON COMPOUNDS; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EXPANSION;

BIMATERIAL MICROCANTILEVER SENSORS; MICRO-OPTOMECHANICAL CAMERAS;

INFRARED IMAGING;

EID: 0032614109     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124163     Document Type: Article

References (11)

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