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0040854918
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note
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res = 12.189 kHz.
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10
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0039076600
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note
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SiNx = 600 nm.
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0040854916
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have created operating arrays of 50 cantilevers with both piezoelectric sensing and even actuation; C. Quate, private communication
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Currently, C. Quate and S. Minnie have created operating arrays of 50 cantilevers with both piezoelectric sensing and even actuation; C. Quate, private communication, 1996.
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Currently, C.Q.1
Minnie, S.2
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