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Volumn 35, Issue 1-4, 1997, Pages 373-379

Micromechanics: A toolbox for femtoscale science: "Towards a laboratory on a tip"

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; CHEMICAL REACTIONS; CRYSTALS; ELECTROCHEMISTRY; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; SENSORS; SPECTROMETERS; THERMOANALYSIS; THERMOCOUPLES; THIN FILMS;

EID: 0031072046     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00201-8     Document Type: Article
Times cited : (153)

References (27)
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    • (1994) Chem. Phys. Lett. , vol.217 , pp. 589
    • Gimzewski, J.K.1    Gerber, Ch.2    Meyer, E.3    Schlittler, R.R.4
  • 2
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    • H.-J. Güntherodt, D. Anselmetti and E. Meyer (eds.) Kluwer, Dordrecht
    • J.K. Gimzewski, Ch. Gerber, E. Meyer, R.R. Schlittler, in Chem. Phys. Lett. 217 (1994) 589; J.K. Gimzewski, Ch. Gerber, E. Meyer, R.R. Schlittler, in Forces in Scanning Probe Methods, H.-J. Güntherodt, D. Anselmetti and E. Meyer (eds.) (Kluwer, Dordrecht, 1995) 123.
    • (1995) Forces in Scanning Probe Methods , pp. 123
    • Gimzewski, J.K.1    Gerber, Ch.2    Meyer, E.3    Schlittler, R.R.4
  • 6
    • 0003491485 scopus 로고
    • The ultimate limits of fabrication and measurement
    • M.E. Welland and J.K. Gimzewski (eds.), Kluwer, Dordrecht
    • E. Meyer, J.K. Gimzewski, Ch. Gerber, R.R. Schlittler, in The Ultimate Limits of Fabrication and Measurement, M.E. Welland and J.K. Gimzewski (eds.), NATO ASI Series Vol. 292 (Kluwer, Dordrecht, 1995) 89.
    • (1995) NATO ASI Series , vol.292 , pp. 89
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  • 8
    • 0040854918 scopus 로고    scopus 로고
    • note
    • res = 12.189 kHz.
  • 10
    • 0039076600 scopus 로고    scopus 로고
    • note
    • SiNx = 600 nm.
  • 21
    • 0000286885 scopus 로고    scopus 로고
    • S.C. Minne, S.R. Manalis, A. Atalar, C.F. Quate, Appl. Phys. Lett. 68 (1996) 1427 ; T. Fujii and S. Watanabe, Appl. Phys. Lett. 68 (1996) 467; T. Fujii, S. Watanabe, M. Suzuki, T. Fujiu, J. Vac. Sci. Technol. B 13 (1995) 1119.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 1427
    • Minne, S.C.1    Manalis, S.R.2    Atalar, A.3    Quate, C.F.4
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    • 0003051886 scopus 로고    scopus 로고
    • S.C. Minne, S.R. Manalis, A. Atalar, C.F. Quate, Appl. Phys. Lett. 68 (1996) 1427 ; T. Fujii and S. Watanabe, Appl. Phys. Lett. 68 (1996) 467; T. Fujii, S. Watanabe, M. Suzuki, T. Fujiu, J. Vac. Sci. Technol. B 13 (1995) 1119.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 467
    • Fujii, T.1    Watanabe, S.2
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    • S.C. Minne, S.R. Manalis, A. Atalar, C.F. Quate, Appl. Phys. Lett. 68 (1996) 1427 ; T. Fujii and S. Watanabe, Appl. Phys. Lett. 68 (1996) 467; T. Fujii, S. Watanabe, M. Suzuki, T. Fujiu, J. Vac. Sci. Technol. B 13 (1995) 1119.
    • (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1119
    • Fujii, T.1    Watanabe, S.2    Suzuki, M.3    Fujiu, T.4
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    • Dissertation No. 11378, Swiss Fed. Inst. of Technology (ETH), Zurich, Switzerland
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    • have created operating arrays of 50 cantilevers with both piezoelectric sensing and even actuation; C. Quate, private communication
    • Currently, C. Quate and S. Minnie have created operating arrays of 50 cantilevers with both piezoelectric sensing and even actuation; C. Quate, private communication, 1996.
    • (1996)
    • Currently, C.Q.1    Minnie, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.