Micromachines for nanoscale science and technology

Nanotechnology

Volumn 10, Issue 1, 1999, Pages 29-33

  Hoummady, Moussa ^a   Fujita, Hiroyuki ^b  

^a FEMTO ST INSTITUTE   (France)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROMACHINING; MICROSENSORS; SCANNING TUNNELING MICROSCOPY;

MICROMACHINES; MONOLITHIC NANOSCANNERS; SMART NANOSYSTEMS;

NANOTECHNOLOGY;

EID: 0032659162     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/1/007     Document Type: Article

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