High-speed atomic force microscopy using an integrated actuator and optical lever detection

Review of Scientific Instruments

Volumn 67, Issue 9, 1996, Pages 3294-3297

  Manalis, S R ^a   Minne, S C ^a   Atalar, A ^a,b   Quate, C F ^a  

^a STANFORD UNIVERSITY   (United States)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANGLE MEASUREMENT; BANDWIDTH; CRYSTAL STRUCTURE; FREQUENCY RESPONSE; GOLD; OPTICAL SENSORS; PHOTODIODES; SERVOMECHANISMS; STRESSES; ZINC OXIDE;

CANTILEVER STRESS; DEFLECTION ANGLE; OPTICAL LEVER DETECTION; PIEZOELECTRIC ACTUATOR; PIEZORESISTORS;

ATOMIC FORCE MICROSCOPY;

EID: 0030244948     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147410     Document Type: Article

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