Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Nanotechnology

Volumn 12, Issue 2, 2001, Pages 100-104

  Abadal, G ^a   Davis, Z J ^b   Helbo, B ^b   Borrise X ^a   Ruiz, R ^a,c   Boisen, A ^b   Campabadal, F ^c   Esteve, J ^c   Figueras, E ^c   Perez Murano F ^a,c   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRON RESONANCE; ELECTROSTATICS; MATHEMATICAL MODELS; SENSITIVITY ANALYSIS;

RESONATING CANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035356970     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/2/305     Document Type: Conference Paper

References (15)