SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 33, Issue 2, 2002, Pages 59-64

Piezoresistive SXM sensors

(4) Rangelow, I W a Grabiec, P b Gotszalk, T c Edinger, K d

a UNIVERSITY OF KASSEL (Germany)

b Department of Micro and Nanotechnology of Wide Bandgap Semiconductors (Poland)

c WROCLAW UNIVERSITY OF TECHNOLOGY (Poland)

d UNIVERSITY OF MARYLAND (United States)

Author keywords

Piezoresistive cantilever; Scanning probe microscopy

Indexed keywords

ASPECT RATIO; CAPACITANCE; ELECTROSTATICS; FRICTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSORS; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY; SURFACE TREATMENT;

MICROPROBES; PIEZORESISTIVE CANTILEVER; SCANNING PROBE MICROSCOPY;

MICROSCOPIC EXAMINATION;

EID: 0036471193 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1162 Document Type: Article

Times cited : (28)

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