Effects of temperature and pressure on microcantilever resonance response

Ultramicroscopy

Volumn 97, Issue 1-4, 2003, Pages 119-126

  Mertens, Johann ^a   Finot, Eric ^a   Thundat, Thomas ^b   Fabre, Arnaud ^a,c   Nadal, Marie Hélène ^c   Eyraud, Vincent ^c   Bourillot, Eric ^a  

^a UNIVERSITÉ DE BOURGOGNE   (France)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c Laboratoire d'Etudes de Physique   (France)

Author keywords

Cantilever; Gas sensor; Knudsen number; Pressure; Temperature

Indexed keywords

ELASTIC MODULI; HELIUM; NITROGEN; SILICON; THERMAL EFFECTS;

MICROCANTILEVER RESONANCE;

CANTILEVER BEAMS;

HELIUM; NITROGEN; SILICON;

ANALYTICAL PARAMETERS; ARTICLE; ATMOSPHERE; CHEMICAL ANALYSIS; FLOW KINETICS; FLOW MEASUREMENT; GAS; HEAT TREATMENT; MOLECULAR MECHANICS; PHYSICAL CHEMISTRY; PRESSURE; TEMPERATURE; VACUUM; VISCOSITY; YOUNG MODULUS;

EID: 0038542123     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00036-6     Document Type: Article

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