Analysis and design of an interdigital cantilever as a displacement sensor

Journal of Applied Physics

Volumn 83, Issue 12, 1998, Pages 7405-7415

  Yaralioglu, G G ^a   Atalar, A ^a   Manalis, S R ^b   Quate, C F ^b  

^a BILKENT UNIVERSITY   (Turkey)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000455920     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367984     Document Type: Article

References (15)

1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987).
3. D. Rugar, H. J. Mamin, and P. Guethner, Appl. Phys. Lett. 55, 2588 (1989).
4. G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 1045 (1988).
5. S. Alexander, L. Hellemas, O. Marti, J. Schneir, V. Elings, P. K. Hansma, M. Longmire, and J. Gurley, J. Appl. Phys. 65, 164 (1989).
6. M. Tortonese, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993).
7. S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995).
8. S. R. Manalis, S. C. Minne, A. Atalar, and C. F. Quate, Appl. Phys. Lett. 69, 3944 (1996).
9. ANSYS, Inc., 201 Johnson Road, Houston, PA 15342-0065.
10. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).
11. K. Iizuka, Engineering Optics (Springer, New York, 1986).
12. D. Sarid, Scaning Force Microscopy (Oxford University Press, New York, 1991).
13. K. Petermann, Laser Diode Modulation and Noises (Kluwer Academic, Dordrecht, 1988).
14. U. Durig, J. K. Gimzewski, D W. Pohl, and R. Schlittler, Phys. Rev. Lett. 57, 2403 (1986).
15. G. M. McClelland, R. Erlandson, and S. Chang, Review of Progress in Quantitative Non-Destructive Evaluation (Plenum, New York, 1987).